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1. 
Cover image for Novel advances in microsystems technologies and their applications
Novel advances in microsystems technologies and their applications
Author 
Francis, Laurent A., editor. Iniewski, Krzysztof, 1960- editor.
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ONLINE
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2. 
Cover image for Microfabrication and nanomanufacturing
Microfabrication and nanomanufacturing
Author 
Jackson, Mark J.
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3. 
Cover image for MEMS introduction and fundamentals
MEMS introduction and fundamentals
Author 
Gad-el-Hak, Mohamed, 1945-
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4. 
Cover image for Enabling technology for MEMS and nanodevices
Enabling technology for MEMS and nanodevices
Author 
Baltes, H. (Henry) Wiley InterScience (Online service)
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John Wiley http://dx.doi.org/10.1002/9783527616701
HathiTrust Digital Library, Limited view (search only) http://catalog.hathitrust.org/api/volumes/oclc/55807757.html
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5. 
Cover image for Micromechanics and MEMS classic and seminal papers to 1990
Micromechanics and MEMS classic and seminal papers to 1990
Author 
Trimmer, W. Institute of Electrical and Electronics Engineers.
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IEEE Xplore http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5273520
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