Switch to list view
Switch to thumbnail view
Select an Action
8 Results Found Subscribe to search results
00000000DEFAULT
Print
1. 
Cover image for Plasma etching an introduction
Plasma etching an introduction
Author 
Manos, Dennis M. Flamm, Daniel L.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780124693708
Format: 
Availability 
Online Library~1
Available:
Copies:
2. 
Cover image for Dry etching for microelectronics
Dry etching for microelectronics
Author 
Powell, Ronald A.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780444869050
Format: 
Availability 
Online Library~1
Available:
Copies:
3. 
Cover image for Etching in microsystem technology
Etching in microsystem technology
Author 
Köhler, J. M. (J. Michael), 1956- Wiley InterScience (Online service)
Preferred Shelf Number 
ONLINE
Electronic Access 
John Wiley http://dx.doi.org/10.1002/9783527613786
Format: 
Availability 
Online Library~1
Available:
Copies:
4. 
Cover image for Plasma etching processes for CMOS device realization
Plasma etching processes for CMOS device realization
Author 
Posseme, Nicolas, editor.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9781785480966
Format: 
Availability 
Online Library~1
Available:
Copies:
5. 
Cover image for Plasma deposition, treatment, and etching of polymers
Plasma deposition, treatment, and etching of polymers
Author 
D'Agostino, Riccardo.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780122004308
Format: 
Availability 
Online Library~1
Available:
Copies:
6. 
Cover image for Micromachining using electrochemical discharge phenomenon fundamentals and applications of spark assisted chemical engraving
Micromachining using electrochemical discharge phenomenon fundamentals and applications of spark assisted chemical engraving
Author 
Wüthrich, Rolf.
Preferred Shelf Number 
ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780815515876
Format: 
Availability 
Online Library~1
Available:
Copies:
7. 
Cover image for Principles of plasma discharges and materials processing
Principles of plasma discharges and materials processing
Author 
Lieberman, M. A. (Michael A.) Lichtenberg, Allan J.
Preferred Shelf Number 
ONLINE
Electronic Access 
Full text available from Wiley InterScience
Ebook Library http://public.eblib.com/EBLPublic/PublicView.do?ptiID=227410
John Wiley http://dx.doi.org/10.1002/0471724254
http://www3.interscience.wiley.com/cgi-bin/bookhome/109880578
Contributor biographical information http://catdir.loc.gov/catdir/enhancements/fy0618/2004058503-b.html
Format: 
Availability 
Online Library~1
Available:
Copies:
8. 
Cover image for Ätzverfahren für die Mikrotechnik
Ätzverfahren für die Mikrotechnik
Author 
Köhler, J. M. (J. Michael), 1956- John Wiley & Sons.
Preferred Shelf Number 
ONLINE
Electronic Access 
John Wiley http://dx.doi.org/10.1002/3527602917
Format: 
Availability 
Online Library~1
Available:
Copies: