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Cover image for Small scale structures proceedings of Symposium A on Microstructuring and Microsystems, Symposium B on Materials for Sensors: Functional Nanoscaled Structures, and Symposium E on Structure and Properties of Metallic Thin Films and Multilayers of the 1995 E-MRS Spring Conference, Strasbourg, France, May 22-26, 1995
Small scale structures proceedings of Symposium A on Microstructuring and Microsystems, Symposium B on Materials for Sensors: Functional Nanoscaled Structures, and Symposium E on Structure and Properties of Metallic Thin Films and Multilayers of the 1995 E-MRS Spring Conference, Strasbourg, France, May 22-26, 1995
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Symposium A on Microstructuring and Microsystems (1995 : Strasbourg, France) Rooij, N. F. de. Symposium B on Materials for Sensors: Functional Nanoscaled Structures (1995 : Strasbourg, France) Symposium E on Structure and Properties of Metallic Thin Films and Multilayers (1995 : Strasbourg, France)
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ScienceDirect http://www.sciencedirect.com/science/book/9780444823120
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2. 
Cover image for Modeling of film deposition for microelectronic applications
Modeling of film deposition for microelectronic applications
Author 
Rossnagel, Stephen M.
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ScienceDirect http://www.sciencedirect.com/science/book/9780125330220
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