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1. 
Cover image for Microlithography science and technology
Microlithography science and technology
Author 
Suzuki, Kazuaki. Smith, Bruce W., 1959-
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2. 
Cover image for Handbook of VLSI microlithography principles, technology, and applications
Handbook of VLSI microlithography principles, technology, and applications
Author 
Helbert, John N.
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ONLINE
Electronic Access 
ScienceDirect http://www.sciencedirect.com/science/book/9780815514442
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3. 
Cover image for Handbook of VLSI microlithography principles, technology, and applications
Handbook of VLSI microlithography principles, technology, and applications
Author 
Glendinning, William B. Helbert, John N.
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ScienceDirect http://www.sciencedirect.com/science/book/9780815512813
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4. 
Cover image for Materials and Processes for Next Generation Lithography.
Materials and Processes for Next Generation Lithography.
Author 
Robinson, Alex, editor. Lawson, Richard, editor.
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ONLINE
Electronic Access 
ScienceDirect https://www.sciencedirect.com/science/bookseries/18762778/11
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5. 
Cover image for Photomask fabrication technology
Photomask fabrication technology
Author 
Eynon, Benjamin G. Wu, Banqiu.
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6. 
Cover image for Computational lithography
Computational lithography
Author 
Ma, Xu, 1983- Arce, Gonzalo R. Wiley InterScience (Online service)
Preferred Shelf Number 
ONLINE
Electronic Access 
Available by subscription from Safari Books Online
Ebook Library http://public.eblib.com/EBLPublic/PublicView.do?ptiID=588875
John Wiley http://dx.doi.org/10.1002/9780470618943
Books24x7 http://www.books24x7.com/marc.asp?bookid=36422
Volltext http://proquest.tech.safaribooksonline.de/9781118043578
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7. 
Cover image for Fundamental principles of optical lithography the science of microfabrication
Fundamental principles of optical lithography the science of microfabrication
Author 
Mack, Chris A. Wiley InterScience (Online service)
Preferred Shelf Number 
ONLINE
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John Wiley http://dx.doi.org/10.1002/9780470723876
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8. 
Cover image for Etching in microsystem technology
Etching in microsystem technology
Author 
Köhler, J. M. (J. Michael), 1956- Wiley InterScience (Online service)
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John Wiley http://dx.doi.org/10.1002/9783527613786
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9. 
Cover image for Ätzverfahren für die Mikrotechnik
Ätzverfahren für die Mikrotechnik
Author 
Köhler, J. M. (J. Michael), 1956- John Wiley & Sons.
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John Wiley http://dx.doi.org/10.1002/3527602917
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10. 
Cover image for Laser microfabrication thin film processes and lithography
Laser microfabrication thin film processes and lithography
Author 
Ehrlich, Daniel J. Tsao, Jeffrey Y.
Preferred Shelf Number 
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ScienceDirect http://www.sciencedirect.com/science/book/9780122334306
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