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1. 
Cover image for Plasma etching an introduction
Plasma etching an introduction
Author 
Manos, Dennis M. Flamm, Daniel L.
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ScienceDirect http://www.sciencedirect.com/science/book/9780124693708
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2. 
Cover image for Plasma deposition, treatment, and etching of polymers
Plasma deposition, treatment, and etching of polymers
Author 
D'Agostino, Riccardo.
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ScienceDirect http://www.sciencedirect.com/science/book/9780122004308
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3. 
Cover image for Plasma etching processes for CMOS device realization
Plasma etching processes for CMOS device realization
Author 
Posseme, Nicolas, editor.
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ScienceDirect http://www.sciencedirect.com/science/book/9781785480966
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4. 
Cover image for Principles of plasma discharges and materials processing
Principles of plasma discharges and materials processing
Author 
Lieberman, M. A. (Michael A.) Lichtenberg, Allan J.
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Full text available from Wiley InterScience
Ebook Library http://public.eblib.com/EBLPublic/PublicView.do?ptiID=227410
John Wiley http://dx.doi.org/10.1002/0471724254
http://www3.interscience.wiley.com/cgi-bin/bookhome/109880578
Contributor biographical information http://catdir.loc.gov/catdir/enhancements/fy0618/2004058503-b.html
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5. 
Cover image for Micromachining using electrochemical discharge phenomenon fundamentals and applications of spark assisted chemical engraving
Micromachining using electrochemical discharge phenomenon fundamentals and applications of spark assisted chemical engraving
Author 
Wüthrich, Rolf.
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ScienceDirect http://www.sciencedirect.com/science/book/9780815515876
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6. 
Cover image for Etching in microsystem technology
Etching in microsystem technology
Author 
Köhler, J. M. (J. Michael), 1956- Wiley InterScience (Online service)
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John Wiley http://dx.doi.org/10.1002/9783527613786
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7. 
Cover image for Ätzverfahren für die Mikrotechnik
Ätzverfahren für die Mikrotechnik
Author 
Köhler, J. M. (J. Michael), 1956- John Wiley & Sons.
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John Wiley http://dx.doi.org/10.1002/3527602917
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8. 
Cover image for Dry etching for microelectronics
Dry etching for microelectronics
Author 
Powell, Ronald A.
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ScienceDirect http://www.sciencedirect.com/science/book/9780444869050
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