Search Results for Chemical mechanical planarization. SirsiDynix Enterprise https://katalog.hacettepe.edu.tr/client/en_US/default/default/qu$003dChemical$002bmechanical$002bplanarization.$0026ic$003dtrue$0026ps$003d300? 2024-09-13T12:54:04Z Tribology in chemical-mechanical planarization ent://SD_ILS/0/SD_ILS:119554 2024-09-13T12:54:04Z 2024-09-13T12:54:04Z Author&#160;Liang, Hong.&#160;Craven, David.<br/>Preferred Shelf Number&#160;TJ1075 .L53 2005<br/>Format:&#160;Books<br/>Availability&#160;Beytepe Library~1<br/> Advances in chemical mechanical planarization (CMP) ent://SD_ILS/0/SD_ILS:458681 2024-09-13T12:54:04Z 2024-09-13T12:54:04Z Author&#160;Babu, S. V., editor.<br/>Preferred Shelf Number&#160;ONLINE<br/>Electronic Access&#160;ScienceDirect <a href="http://www.sciencedirect.com/science/book/9780081001653">http://www.sciencedirect.com/science/book/9780081001653</a><br/>Format:&#160;Electronic Resources<br/>Availability&#160;Online Library~1<br/> Microelectronic applications of chemical mechanical planarization ent://SD_ILS/0/SD_ILS:297048 2024-09-13T12:54:04Z 2024-09-13T12:54:04Z Author&#160;Li, Yuzhuo.&#160;Wiley InterScience (Online service)<br/>Preferred Shelf Number&#160;ONLINE<br/>Electronic Access&#160;Contributor biographical information <a href="http://catdir.loc.gov/catdir/enhancements/fy0742/2007015557-b.html">http://catdir.loc.gov/catdir/enhancements/fy0742/2007015557-b.html</a> John Wiley <a href="http://dx.doi.org/10.1002/9780470180907">http://dx.doi.org/10.1002/9780470180907</a><br/>Format:&#160;Electronic Resources<br/>Availability&#160;Online Library~1<br/> Tribology in chemical-mechanical planarization ent://SD_ILS/0/SD_ILS:288489 2024-09-13T12:54:04Z 2024-09-13T12:54:04Z Author&#160;Liang, Hong, 1961-&#160;Craven, David R., 1945-<br/>Preferred Shelf Number&#160;ONLINE<br/>Electronic Access&#160;<a href="http://marc.crcnetbase.com/isbn/9781420028393">Distributed by publisher. Purchase or institutional license may be required for access.</a><br/>Format:&#160;Electronic Resources<br/>Availability&#160;Online Library~1<br/> Chemical mechanical planarization of microelectronic materials ent://SD_ILS/0/SD_ILS:300816 2024-09-13T12:54:04Z 2024-09-13T12:54:04Z Author&#160;Steigerwald, Joseph M.&#160;Murarka, S. P.&#160;Gutmann, Ronald J.&#160;Wiley InterScience (Online service)<br/>Preferred Shelf Number&#160;ONLINE<br/>Electronic Access&#160;John Wiley <a href="http://dx.doi.org/10.1002/9783527617746">http://dx.doi.org/10.1002/9783527617746</a> Contributor biographical information <a href="http://catdir.loc.gov/catdir/bios/wiley041/96006198.html">http://catdir.loc.gov/catdir/bios/wiley041/96006198.html</a><br/>Format:&#160;Electronic Resources<br/>Availability&#160;Online Library~1<br/> Nanoparticle engineering for chemical-mechanical planarization fabrication of next-generation nanodevices ent://SD_ILS/0/SD_ILS:290562 2024-09-13T12:54:04Z 2024-09-13T12:54:04Z Author&#160;Paik, Ungyu.&#160;Park, Jea-Gun.<br/>Preferred Shelf Number&#160;ONLINE<br/>Electronic Access&#160;<a href="http://marc.crcnetbase.com/isbn/9781420059137">Distributed by publisher. Purchase or institutional license may be required for access.</a><br/>Format:&#160;Electronic Resources<br/>Availability&#160;Online Library~1<br/>