Search Results for Chemical mechanical planarization. - Narrowed by: Nanoelectronics.SirsiDynix Enterprisehttps://katalog.hacettepe.edu.tr/client/en_US/default/default/qu$003dChemical$002bmechanical$002bplanarization.$0026qf$003dSUBJECT$002509Subject$002509Nanoelectronics.$002509Nanoelectronics.$0026ic$003dtrue$0026ps$003d300?2024-11-06T08:08:50ZAdvances in chemical mechanical planarization (CMP)ent://SD_ILS/0/SD_ILS:4586812024-11-06T08:08:50Z2024-11-06T08:08:50ZAuthor Babu, S. V., editor.<br/>Preferred Shelf Number ONLINE<br/>Electronic Access ScienceDirect <a href="http://www.sciencedirect.com/science/book/9780081001653">http://www.sciencedirect.com/science/book/9780081001653</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>Nanoparticle engineering for chemical-mechanical planarization fabrication of next-generation nanodevicesent://SD_ILS/0/SD_ILS:2905622024-11-06T08:08:50Z2024-11-06T08:08:50ZAuthor Paik, Ungyu. Park, Jea-Gun.<br/>Preferred Shelf Number ONLINE<br/>Electronic Access <a href="http://marc.crcnetbase.com/isbn/9781420059137">Distributed by publisher. Purchase or institutional license may be required for access.</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>