Search Results for Chemical mechanical planarization.SirsiDynix Enterprisehttps://katalog.hacettepe.edu.tr/client/en_US/default/default/qu$003dChemical$002bmechanical$002bplanarization.$0026te$003dILS$0026ps$003d300?2025-01-18T12:47:06ZTribology in chemical-mechanical planarizationent://SD_ILS/0/SD_ILS:1195542025-01-18T12:47:06Z2025-01-18T12:47:06ZAuthor Liang, Hong. Craven, David.<br/>Preferred Shelf Number TJ1075 .L53 2005<br/>Format: Books<br/>Availability Beytepe Library~1<br/>Advances in chemical mechanical planarization (CMP)ent://SD_ILS/0/SD_ILS:4586812025-01-18T12:47:06Z2025-01-18T12:47:06ZAuthor Babu, S. V., editor.<br/>Preferred Shelf Number ONLINE<br/>Electronic Access ScienceDirect <a href="http://www.sciencedirect.com/science/book/9780081001653">http://www.sciencedirect.com/science/book/9780081001653</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>Microelectronic applications of chemical mechanical planarizationent://SD_ILS/0/SD_ILS:2970482025-01-18T12:47:06Z2025-01-18T12:47:06ZAuthor Li, Yuzhuo. Wiley InterScience (Online service)<br/>Preferred Shelf Number ONLINE<br/>Electronic Access Contributor biographical information <a href="http://catdir.loc.gov/catdir/enhancements/fy0742/2007015557-b.html">http://catdir.loc.gov/catdir/enhancements/fy0742/2007015557-b.html</a>
John Wiley <a href="http://dx.doi.org/10.1002/9780470180907">http://dx.doi.org/10.1002/9780470180907</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>Tribology in chemical-mechanical planarizationent://SD_ILS/0/SD_ILS:2884892025-01-18T12:47:06Z2025-01-18T12:47:06ZAuthor Liang, Hong, 1961- Craven, David R., 1945-<br/>Preferred Shelf Number ONLINE<br/>Electronic Access <a href="http://marc.crcnetbase.com/isbn/9781420028393">Distributed by publisher. Purchase or institutional license may be required for access.</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>Chemical mechanical planarization of microelectronic materialsent://SD_ILS/0/SD_ILS:3008162025-01-18T12:47:06Z2025-01-18T12:47:06ZAuthor Steigerwald, Joseph M. Murarka, S. P. Gutmann, Ronald J. Wiley InterScience (Online service)<br/>Preferred Shelf Number ONLINE<br/>Electronic Access John Wiley <a href="http://dx.doi.org/10.1002/9783527617746">http://dx.doi.org/10.1002/9783527617746</a>
Contributor biographical information <a href="http://catdir.loc.gov/catdir/bios/wiley041/96006198.html">http://catdir.loc.gov/catdir/bios/wiley041/96006198.html</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>Nanoparticle engineering for chemical-mechanical planarization fabrication of next-generation nanodevicesent://SD_ILS/0/SD_ILS:2905622025-01-18T12:47:06Z2025-01-18T12:47:06ZAuthor Paik, Ungyu. Park, Jea-Gun.<br/>Preferred Shelf Number ONLINE<br/>Electronic Access <a href="http://marc.crcnetbase.com/isbn/9781420059137">Distributed by publisher. Purchase or institutional license may be required for access.</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>