Search Results for Cleaning. - Narrowed by: Chemical mechanical planarization.
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2026-01-16T14:44:04Z
Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices
ent://SD_ILS/0/SD_ILS:541443
2026-01-16T14:44:04Z
2026-01-16T14:44:04Z
Author Paik, Ungyu. Park, Jea-Gun.<br/>Preferred Shelf Number TK7874.84<br/>Electronic Access Taylor & Francis <a href="https://www.taylorfrancis.com/books/9780429291890">https://www.taylorfrancis.com/books/9780429291890</a>
OCLC metadata license agreement <a href="http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf">http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>
Tribology in chemical-mechanical planarization
ent://SD_ILS/0/SD_ILS:541863
2026-01-16T14:44:04Z
2026-01-16T14:44:04Z
Author Liang, Hong, 1961, author. Craven, David R., 1945-<br/>Preferred Shelf Number TJ1075 .L49 2005<br/>Electronic Access <a href="https://www.taylorfrancis.com/books/9781420028393">Click here to view.</a><br/>Format: Books<br/>Availability Online Library~1<br/>