Search Results for Etching. - Narrowed by: Microelectromechanical systems. SirsiDynix Enterprise https://katalog.hacettepe.edu.tr/client/en_US/default/default/qu$003dEtching.$0026qf$003dSUBJECT$002509Subject$002509Microelectromechanical$002bsystems.$002509Microelectromechanical$002bsystems.$0026ps$003d300?dt=list 2026-03-23T18:48:21Z Nanofabrication Principles, Capabilities and Limits ent://SD_ILS/0/SD_ILS:604302 2026-03-23T18:48:21Z 2026-03-23T18:48:21Z Author&#160;Cui, Zheng. author.&#160;SpringerLink (Online service)<br/>Preferred Shelf Number&#160;ONLINE<br/>Electronic Access&#160;<a href="https://doi.org/10.1007/978-3-031-62546-6">https://doi.org/10.1007/978-3-031-62546-6</a><br/>Format:&#160;Electronic Resources<br/>Availability&#160;Online Library~1<br/> Materials for Advanced Packaging ent://SD_ILS/0/SD_ILS:611028 2026-03-23T18:48:21Z 2026-03-23T18:48:21Z Author&#160;Lu, Daniel. editor.&#160;Wong, C.P. editor.&#160;SpringerLink (Online service)<br/>Preferred Shelf Number&#160;ONLINE<br/>Electronic Access&#160;<a href="https://doi.org/10.1007/978-3-319-45098-8">https://doi.org/10.1007/978-3-319-45098-8</a><br/>Format:&#160;Electronic Resources<br/>Availability&#160;Online Library~1<br/> Micro and Nano Fabrication Tools and Processes ent://SD_ILS/0/SD_ILS:530075 2026-03-23T18:48:21Z 2026-03-23T18:48:21Z Author&#160;Gatzen, Hans H. author.&#160;Saile, Volker. author.&#160;Leuthold, J&uuml;rg. author.&#160;SpringerLink (Online service)<br/>Preferred Shelf Number&#160;ONLINE<br/>Electronic Access&#160;<a href="https://doi.org/10.1007/978-3-662-44395-8">https://doi.org/10.1007/978-3-662-44395-8</a><br/>Format:&#160;Electronic Resources<br/>Availability&#160;Online Library~1<br/> Photonic MEMS devices : design, fabrication and control ent://SD_ILS/0/SD_ILS:547879 2026-03-23T18:48:21Z 2026-03-23T18:48:21Z Author&#160;Liu, Ai-Qun, author.<br/>Preferred Shelf Number&#160;TK7875 .L58 2009<br/>Electronic Access&#160;<a href="https://www.taylorfrancis.com/books/9781420045710">Click here to view.</a><br/>Format:&#160;Books<br/>Availability&#160;Online Library~1<br/>