Search Results for Etching. - Narrowed by: Microelectromechanical systems.
SirsiDynix Enterprise
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2026-01-17T18:35:34Z
Micro and Nano Fabrication Tools and Processes
ent://SD_ILS/0/SD_ILS:530075
2026-01-17T18:35:34Z
2026-01-17T18:35:34Z
Author Gatzen, Hans H. author. Saile, Volker. author. Leuthold, Jürg. author. SpringerLink (Online service)<br/>Preferred Shelf Number ONLINE<br/>Electronic Access <a href="https://doi.org/10.1007/978-3-662-44395-8">https://doi.org/10.1007/978-3-662-44395-8</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>
Photonic MEMS devices : design, fabrication and control
ent://SD_ILS/0/SD_ILS:547879
2026-01-17T18:35:34Z
2026-01-17T18:35:34Z
Author Liu, Ai-Qun, author.<br/>Preferred Shelf Number TK7875 .L58 2009<br/>Electronic Access <a href="https://www.taylorfrancis.com/books/9781420045710">Click here to view.</a><br/>Format: Books<br/>Availability Online Library~1<br/>