Search Results for Microelectromechanical systems. - Narrowed by: Actuators.SirsiDynix Enterprisehttps://katalog.hacettepe.edu.tr/client/en_US/default/default/qu$003dMicroelectromechanical$002bsystems.$0026qf$003dSUBJECT$002509Subject$002509Actuators.$002509Actuators.$0026te$003dILS$0026ps$003d300?2025-12-15T03:59:56ZOptical nano and micro actuator technologyent://SD_ILS/0/SD_ILS:5424672025-12-15T03:59:56Z2025-12-15T03:59:56ZAuthor Knopf, George K. Otani, Yukitoshi.<br/>Preferred Shelf Number TK8304 .O65 2013<br/>Electronic Access <a href="https://www.taylorfrancis.com/books/9781315217628">Click here to view.</a><br/>Format: Books<br/>Availability Online Library~1<br/>Micromechanics and MEMS classic and seminal papers to 1990ent://SD_ILS/0/SD_ILS:2495922025-12-15T03:59:56Z2025-12-15T03:59:56ZAuthor Trimmer, W. Institute of Electrical and Electronics Engineers.<br/>Preferred Shelf Number ONLINE<br/>Electronic Access IEEE Xplore <a href="http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5273520">http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5273520</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>