Search Results for Microelectronics -- Materials. - Narrowed by: Chemical mechanical planarization.
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2026-06-14T16:13:55Z
Microelectronic applications of chemical mechanical planarization
ent://SD_ILS/0/SD_ILS:297048
2026-06-14T16:13:55Z
2026-06-14T16:13:55Z
Author Li, Yuzhuo. Wiley InterScience (Online service)<br/>Preferred Shelf Number ONLINE<br/>Electronic Access Contributor biographical information <a href="http://catdir.loc.gov/catdir/enhancements/fy0742/2007015557-b.html">http://catdir.loc.gov/catdir/enhancements/fy0742/2007015557-b.html</a>
John Wiley <a href="http://dx.doi.org/10.1002/9780470180907">http://dx.doi.org/10.1002/9780470180907</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>
Chemical mechanical planarization of microelectronic materials
ent://SD_ILS/0/SD_ILS:300816
2026-06-14T16:13:55Z
2026-06-14T16:13:55Z
Author Steigerwald, Joseph M. Murarka, S. P. Gutmann, Ronald J. Wiley InterScience (Online service)<br/>Preferred Shelf Number ONLINE<br/>Electronic Access John Wiley <a href="http://dx.doi.org/10.1002/9783527617746">http://dx.doi.org/10.1002/9783527617746</a>
Contributor biographical information <a href="http://catdir.loc.gov/catdir/bios/wiley041/96006198.html">http://catdir.loc.gov/catdir/bios/wiley041/96006198.html</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>