Search Results for Microelectronics. - Narrowed by: 1997 SirsiDynix Enterprise https://katalog.hacettepe.edu.tr/client/en_US/default/default/qu$003dMicroelectronics.$0026qf$003dPUBDATE$002509Publication$002bDate$0025091997$0025091997$0026ps$003d300$0026isd$003dtrue? 2024-11-15T18:07:51Z Micromechanics and MEMS classic and seminal papers to 1990 ent://SD_ILS/0/SD_ILS:249592 2024-11-15T18:07:51Z 2024-11-15T18:07:51Z Author&#160;Trimmer, W.&#160;Institute of Electrical and Electronics Engineers.<br/>Preferred Shelf Number&#160;ONLINE<br/>Electronic Access&#160;IEEE Xplore <a href="http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5273520">http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5273520</a><br/>Format:&#160;Electronic Resources<br/>Availability&#160;Online Library~1<br/> Chemical mechanical planarization of microelectronic materials ent://SD_ILS/0/SD_ILS:300816 2024-11-15T18:07:51Z 2024-11-15T18:07:51Z Author&#160;Steigerwald, Joseph M.&#160;Murarka, S. P.&#160;Gutmann, Ronald J.&#160;Wiley InterScience (Online service)<br/>Preferred Shelf Number&#160;ONLINE<br/>Electronic Access&#160;John Wiley <a href="http://dx.doi.org/10.1002/9783527617746">http://dx.doi.org/10.1002/9783527617746</a> Contributor biographical information <a href="http://catdir.loc.gov/catdir/bios/wiley041/96006198.html">http://catdir.loc.gov/catdir/bios/wiley041/96006198.html</a><br/>Format:&#160;Electronic Resources<br/>Availability&#160;Online Library~1<br/>