Search Results for Microelectronics. - Narrowed by: Chemical mechanical planarization.
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https://katalog.hacettepe.edu.tr/client/en_US/default/default/qu$003dMicroelectronics.$0026qf$003dSUBJECT$002509Subject$002509Chemical$002bmechanical$002bplanarization.$002509Chemical$002bmechanical$002bplanarization.$0026te$003dILS$0026ps$003d300?
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Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices
ent://SD_ILS/0/SD_ILS:541443
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Author Paik, Ungyu. Park, Jea-Gun.<br/>Preferred Shelf Number TK7874.84<br/>Electronic Access Taylor & Francis <a href="https://www.taylorfrancis.com/books/9780429291890">https://www.taylorfrancis.com/books/9780429291890</a>
OCLC metadata license agreement <a href="http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf">http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>
Advances in chemical mechanical planarization (CMP)
ent://SD_ILS/0/SD_ILS:458681
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Author Babu, S. V., editor.<br/>Preferred Shelf Number ONLINE<br/>Electronic Access ScienceDirect <a href="http://www.sciencedirect.com/science/book/9780081001653">http://www.sciencedirect.com/science/book/9780081001653</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>
Microelectronic applications of chemical mechanical planarization
ent://SD_ILS/0/SD_ILS:297048
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Author Li, Yuzhuo. Wiley InterScience (Online service)<br/>Preferred Shelf Number ONLINE<br/>Electronic Access Contributor biographical information <a href="http://catdir.loc.gov/catdir/enhancements/fy0742/2007015557-b.html">http://catdir.loc.gov/catdir/enhancements/fy0742/2007015557-b.html</a>
John Wiley <a href="http://dx.doi.org/10.1002/9780470180907">http://dx.doi.org/10.1002/9780470180907</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>
Chemical mechanical planarization of microelectronic materials
ent://SD_ILS/0/SD_ILS:300816
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Author Steigerwald, Joseph M. Murarka, S. P. Gutmann, Ronald J. Wiley InterScience (Online service)<br/>Preferred Shelf Number ONLINE<br/>Electronic Access John Wiley <a href="http://dx.doi.org/10.1002/9783527617746">http://dx.doi.org/10.1002/9783527617746</a>
Contributor biographical information <a href="http://catdir.loc.gov/catdir/bios/wiley041/96006198.html">http://catdir.loc.gov/catdir/bios/wiley041/96006198.html</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>