Search Results for Microlithography -- Industrial applications.SirsiDynix Enterprisehttps://katalog.hacettepe.edu.tr/client/en_US/default/default/qu$003dMicrolithography$002b--$002bIndustrial$002bapplications.$0026ps$003d300?2024-10-31T02:50:14ZFundamental principles of optical lithography the science of microfabricationent://SD_ILS/0/SD_ILS:3026322024-10-31T02:50:14Z2024-10-31T02:50:14ZAuthor Mack, Chris A. Wiley InterScience (Online service)<br/>Preferred Shelf Number ONLINE<br/>Electronic Access John Wiley <a href="http://dx.doi.org/10.1002/9780470723876">http://dx.doi.org/10.1002/9780470723876</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>Microlithography science and technologyent://SD_ILS/0/SD_ILS:2859672024-10-31T02:50:14Z2024-10-31T02:50:14ZAuthor Suzuki, Kazuaki. Smith, Bruce W., 1959-<br/>Preferred Shelf Number ONLINE<br/>Electronic Access <a href="http://marc.crcnetbase.com/isbn/9781420051537">Distributed by publisher. Purchase or institutional license may be required for access.</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>