Search Results for Microlithography -- Industrial applications. - Narrowed by: E-BookSirsiDynix Enterprisehttps://katalog.hacettepe.edu.tr/client/en_US/default/default/qu$003dMicrolithography$002b--$002bIndustrial$002bapplications.$0026qf$003dITYPE$002509Material$002bType$0025091$00253AE-KITAP$002509E-Book$0026ic$003dtrue$0026ps$003d300?2024-09-19T04:42:44ZMicrolithography science and technologyent://SD_ILS/0/SD_ILS:2859672024-09-19T04:42:44Z2024-09-19T04:42:44ZAuthor Suzuki, Kazuaki. Smith, Bruce W., 1959-<br/>Preferred Shelf Number ONLINE<br/>Electronic Access <a href="http://marc.crcnetbase.com/isbn/9781420051537">Distributed by publisher. Purchase or institutional license may be required for access.</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>Fundamental principles of optical lithography the science of microfabricationent://SD_ILS/0/SD_ILS:3026322024-09-19T04:42:44Z2024-09-19T04:42:44ZAuthor Mack, Chris A. Wiley InterScience (Online service)<br/>Preferred Shelf Number ONLINE<br/>Electronic Access John Wiley <a href="http://dx.doi.org/10.1002/9780470723876">http://dx.doi.org/10.1002/9780470723876</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>