Search Results for Microlithography.
SirsiDynix Enterprise
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Microlithography science and technology
ent://SD_ILS/0/SD_ILS:285967
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Author Suzuki, Kazuaki. Smith, Bruce W., 1959-<br/>Preferred Shelf Number ONLINE<br/>Electronic Access <a href="http://marc.crcnetbase.com/isbn/9781420051537">Distributed by publisher. Purchase or institutional license may be required for access.</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>
Handbook of microlithography, micromachining, and microfabrication
ent://SD_ILS/0/SD_ILS:389558
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Author Rai-Choudhury, P.<br/>Preferred Shelf Number TK7836 H3423 1997 V.1<br/>Format: Books<br/>Availability Beytepe Library~2<br/>
Polymers in microlithography : materials and processes
ent://SD_ILS/0/SD_ILS:109162
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Author Reichmanis, Elsa, 1953-, ed. MacDonald, Scott A., ed. Iwayanagi, Takao, 1949-, ed. American Chemical Society. Division of Polymeric Materials: Science and Engineering.<br/>Preferred Shelf Number TK7871.15.P6 P635 1989<br/>Format: Books<br/>Availability Beytepe Library~1<br/>
Handbook of VLSI microlithography principles, technology, and applications
ent://SD_ILS/0/SD_ILS:254148
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Author Helbert, John N.<br/>Preferred Shelf Number ONLINE<br/>Electronic Access ScienceDirect <a href="http://www.sciencedirect.com/science/book/9780815514442">http://www.sciencedirect.com/science/book/9780815514442</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>
Handbook of VLSI microlithography principles, technology, and applications
ent://SD_ILS/0/SD_ILS:254921
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Author Glendinning, William B. Helbert, John N.<br/>Preferred Shelf Number ONLINE<br/>Electronic Access ScienceDirect <a href="http://www.sciencedirect.com/science/book/9780815512813">http://www.sciencedirect.com/science/book/9780815512813</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>
Materials and Processes for Next Generation Lithography.
ent://SD_ILS/0/SD_ILS:459226
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Author Robinson, Alex, editor. Lawson, Richard, editor.<br/>Preferred Shelf Number ONLINE<br/>Electronic Access ScienceDirect <a href="https://www.sciencedirect.com/science/bookseries/18762778/11">https://www.sciencedirect.com/science/bookseries/18762778/11</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>
Photomask fabrication technology
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Author Eynon, Benjamin G. Wu, Banqiu.<br/>Preferred Shelf Number ONLINE<br/>Electronic Access <a href="http://mhebooklibrary.com/reader/photomask-fabrication-technology">Subscription required</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>
Computational lithography
ent://SD_ILS/0/SD_ILS:298011
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Author Ma, Xu, 1983- Arce, Gonzalo R. Wiley InterScience (Online service)<br/>Preferred Shelf Number ONLINE<br/>Electronic Access <a href="http://proquest.safaribooksonline.com/?fpi=9781118043578">Available by subscription from Safari Books Online</a>
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John Wiley <a href="http://dx.doi.org/10.1002/9780470618943">http://dx.doi.org/10.1002/9780470618943</a>
Books24x7 <a href="http://www.books24x7.com/marc.asp?bookid=36422">http://www.books24x7.com/marc.asp?bookid=36422</a>
Volltext <a href="http://proquest.tech.safaribooksonline.de/9781118043578">http://proquest.tech.safaribooksonline.de/9781118043578</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>
Fundamental principles of optical lithography the science of microfabrication
ent://SD_ILS/0/SD_ILS:302632
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Author Mack, Chris A. Wiley InterScience (Online service)<br/>Preferred Shelf Number ONLINE<br/>Electronic Access John Wiley <a href="http://dx.doi.org/10.1002/9780470723876">http://dx.doi.org/10.1002/9780470723876</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>
Etching in microsystem technology
ent://SD_ILS/0/SD_ILS:300698
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Author Köhler, J. M. (J. Michael), 1956- Wiley InterScience (Online service)<br/>Preferred Shelf Number ONLINE<br/>Electronic Access John Wiley <a href="http://dx.doi.org/10.1002/9783527613786">http://dx.doi.org/10.1002/9783527613786</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>
Ätzverfahren für die Mikrotechnik
ent://SD_ILS/0/SD_ILS:300533
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Author Köhler, J. M. (J. Michael), 1956- John Wiley & Sons.<br/>Preferred Shelf Number ONLINE<br/>Electronic Access John Wiley <a href="http://dx.doi.org/10.1002/3527602917">http://dx.doi.org/10.1002/3527602917</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>
Laser microfabrication thin film processes and lithography
ent://SD_ILS/0/SD_ILS:254996
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Author Ehrlich, Daniel J. Tsao, Jeffrey Y.<br/>Preferred Shelf Number ONLINE<br/>Electronic Access ScienceDirect <a href="http://www.sciencedirect.com/science/book/9780122334306">http://www.sciencedirect.com/science/book/9780122334306</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>