Search Results for Microlithography. - Narrowed by: 2007SirsiDynix Enterprisehttps://katalog.hacettepe.edu.tr/client/en_US/default/default/qu$003dMicrolithography.$0026qf$003dPUBDATE$002509Publication$002bDate$0025092007$0025092007$0026ps$003d300?2024-11-07T18:58:43ZMicrolithography science and technologyent://SD_ILS/0/SD_ILS:2859672024-11-07T18:58:43Z2024-11-07T18:58:43ZAuthor Suzuki, Kazuaki. Smith, Bruce W., 1959-<br/>Preferred Shelf Number ONLINE<br/>Electronic Access <a href="http://marc.crcnetbase.com/isbn/9781420051537">Distributed by publisher. Purchase or institutional license may be required for access.</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>Fundamental principles of optical lithography the science of microfabricationent://SD_ILS/0/SD_ILS:3026322024-11-07T18:58:43Z2024-11-07T18:58:43ZAuthor Mack, Chris A. Wiley InterScience (Online service)<br/>Preferred Shelf Number ONLINE<br/>Electronic Access John Wiley <a href="http://dx.doi.org/10.1002/9780470723876">http://dx.doi.org/10.1002/9780470723876</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>