Search Results for Microlithography. - Narrowed by: Plasma etching. SirsiDynix Enterprise https://katalog.hacettepe.edu.tr/client/en_US/default/default/qu$003dMicrolithography.$0026qf$003dSUBJECT$002509Subject$002509Plasma$002betching.$002509Plasma$002betching.$0026te$003dILS$0026ps$003d300? 2024-09-22T04:28:33Z Etching in microsystem technology ent://SD_ILS/0/SD_ILS:300698 2024-09-22T04:28:33Z 2024-09-22T04:28:33Z Author&#160;K&ouml;hler, J. M. (J. Michael), 1956-&#160;Wiley InterScience (Online service)<br/>Preferred Shelf Number&#160;ONLINE<br/>Electronic Access&#160;John Wiley <a href="http://dx.doi.org/10.1002/9783527613786">http://dx.doi.org/10.1002/9783527613786</a><br/>Format:&#160;Electronic Resources<br/>Availability&#160;Online Library~1<br/> &Auml;tzverfahren f&uuml;r die Mikrotechnik ent://SD_ILS/0/SD_ILS:300533 2024-09-22T04:28:33Z 2024-09-22T04:28:33Z Author&#160;K&ouml;hler, J. M. (J. Michael), 1956-&#160;John Wiley &amp; Sons.<br/>Preferred Shelf Number&#160;ONLINE<br/>Electronic Access&#160;John Wiley <a href="http://dx.doi.org/10.1002/3527602917">http://dx.doi.org/10.1002/3527602917</a><br/>Format:&#160;Electronic Resources<br/>Availability&#160;Online Library~1<br/>