Search Results for Plasma - Narrowed by: Plasma etching.
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Plasma etching an introduction
ent://SD_ILS/0/SD_ILS:255208
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Author Manos, Dennis M. Flamm, Daniel L.<br/>Preferred Shelf Number ONLINE<br/>Electronic Access ScienceDirect <a href="http://www.sciencedirect.com/science/book/9780124693708">http://www.sciencedirect.com/science/book/9780124693708</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>
Plasma deposition, treatment, and etching of polymers
ent://SD_ILS/0/SD_ILS:256154
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Author D'Agostino, Riccardo.<br/>Preferred Shelf Number ONLINE<br/>Electronic Access ScienceDirect <a href="http://www.sciencedirect.com/science/book/9780122004308">http://www.sciencedirect.com/science/book/9780122004308</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>
Plasma etching processes for CMOS device realization
ent://SD_ILS/0/SD_ILS:459350
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Author Posseme, Nicolas, editor.<br/>Preferred Shelf Number ONLINE<br/>Electronic Access ScienceDirect <a href="http://www.sciencedirect.com/science/book/9781785480966">http://www.sciencedirect.com/science/book/9781785480966</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>
Principles of plasma discharges and materials processing
ent://SD_ILS/0/SD_ILS:301733
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Author Lieberman, M. A. (Michael A.) Lichtenberg, Allan J.<br/>Preferred Shelf Number ONLINE<br/>Electronic Access <a href="http://dx.doi.org/10.1002/0471724254">Full text available from Wiley InterScience</a>
Ebook Library <a href="http://public.eblib.com/EBLPublic/PublicView.do?ptiID=227410">http://public.eblib.com/EBLPublic/PublicView.do?ptiID=227410</a>
John Wiley <a href="http://dx.doi.org/10.1002/0471724254">http://dx.doi.org/10.1002/0471724254</a>
<a href="http://www3.interscience.wiley.com/cgi-bin/bookhome/109880578">http://www3.interscience.wiley.com/cgi-bin/bookhome/109880578</a>
Contributor biographical information <a href="http://catdir.loc.gov/catdir/enhancements/fy0618/2004058503-b.html">http://catdir.loc.gov/catdir/enhancements/fy0618/2004058503-b.html</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>
Micromachining using electrochemical discharge phenomenon fundamentals and applications of spark assisted chemical engraving
ent://SD_ILS/0/SD_ILS:146215
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Author Wüthrich, Rolf.<br/>Preferred Shelf Number ONLINE<br/>Electronic Access ScienceDirect <a href="http://www.sciencedirect.com/science/book/9780815515876">http://www.sciencedirect.com/science/book/9780815515876</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>
Etching in microsystem technology
ent://SD_ILS/0/SD_ILS:300698
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Author Köhler, J. M. (J. Michael), 1956- Wiley InterScience (Online service)<br/>Preferred Shelf Number ONLINE<br/>Electronic Access John Wiley <a href="http://dx.doi.org/10.1002/9783527613786">http://dx.doi.org/10.1002/9783527613786</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>
Ätzverfahren für die Mikrotechnik
ent://SD_ILS/0/SD_ILS:300533
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Author Köhler, J. M. (J. Michael), 1956- John Wiley & Sons.<br/>Preferred Shelf Number ONLINE<br/>Electronic Access John Wiley <a href="http://dx.doi.org/10.1002/3527602917">http://dx.doi.org/10.1002/3527602917</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>
Dry etching for microelectronics
ent://SD_ILS/0/SD_ILS:256126
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Author Powell, Ronald A.<br/>Preferred Shelf Number ONLINE<br/>Electronic Access ScienceDirect <a href="http://www.sciencedirect.com/science/book/9780444869050">http://www.sciencedirect.com/science/book/9780444869050</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>