Search Results for Plasma etching. SirsiDynix Enterprise https://katalog.hacettepe.edu.tr/client/en_US/default/default/qu$003dPlasma$002betching.$0026ps$003d300? 2026-01-02T10:04:05Z Plasma etching an introduction ent://SD_ILS/0/SD_ILS:255208 2026-01-02T10:04:05Z 2026-01-02T10:04:05Z Author&#160;Manos, Dennis M.&#160;Flamm, Daniel L.<br/>Preferred Shelf Number&#160;ONLINE<br/>Electronic Access&#160;ScienceDirect <a href="http://www.sciencedirect.com/science/book/9780124693708">http://www.sciencedirect.com/science/book/9780124693708</a><br/>Format:&#160;Electronic Resources<br/>Availability&#160;Online Library~1<br/> Plasma etching processes for CMOS device realization ent://SD_ILS/0/SD_ILS:459350 2026-01-02T10:04:05Z 2026-01-02T10:04:05Z Author&#160;Posseme, Nicolas, editor.<br/>Preferred Shelf Number&#160;ONLINE<br/>Electronic Access&#160;ScienceDirect <a href="http://www.sciencedirect.com/science/book/9781785480966">http://www.sciencedirect.com/science/book/9781785480966</a><br/>Format:&#160;Electronic Resources<br/>Availability&#160;Online Library~1<br/> Plasma deposition, treatment, and etching of polymers ent://SD_ILS/0/SD_ILS:256154 2026-01-02T10:04:05Z 2026-01-02T10:04:05Z Author&#160;D'Agostino, Riccardo.<br/>Preferred Shelf Number&#160;ONLINE<br/>Electronic Access&#160;ScienceDirect <a href="http://www.sciencedirect.com/science/book/9780122004308">http://www.sciencedirect.com/science/book/9780122004308</a><br/>Format:&#160;Electronic Resources<br/>Availability&#160;Online Library~1<br/> Plasma surface modification of polymers : relevance to adhesion ent://SD_ILS/0/SD_ILS:546633 2026-01-02T10:04:05Z 2026-01-02T10:04:05Z Author&#160;Lyons, editor.&#160;Mittal, Kash L., 1945- editor.&#160;Taylor and Francis.<br/>Preferred Shelf Number&#160;QD381.9 .S97 P537 2014<br/>Electronic Access&#160;<a href="https://www.taylorfrancis.com/books/9781466563414">Click here to view.</a><br/>Format:&#160;Books<br/>Availability&#160;Online Library~1<br/> Plasma processing of nanomaterials ent://SD_ILS/0/SD_ILS:539463 2026-01-02T10:04:05Z 2026-01-02T10:04:05Z Author&#160;Sankaran, Mohan.<br/>Preferred Shelf Number&#160;TA418.9 .N35 P53 2012<br/>Electronic Access&#160;<a href="https://www.taylorfrancis.com/books/9781315217055">Click here to view.</a><br/>Format:&#160;Books<br/>Availability&#160;Online Library~1<br/> Complex and dusty plasmas : from laboratory to space ent://SD_ILS/0/SD_ILS:538570 2026-01-02T10:04:05Z 2026-01-02T10:04:05Z Author&#160;Fortov, V. E.&#160;Morfill, G. E.<br/>Preferred Shelf Number&#160;QC718.5 .D84 C66 2010<br/>Electronic Access&#160;Taylor & Francis <a href="http://www.taylorfrancis.com/books/9781420083125">http://www.taylorfrancis.com/books/9781420083125</a> Taylor & Francis <a href="https://www.taylorfrancis.com/books/9781420083125">https://www.taylorfrancis.com/books/9781420083125</a> Taylor & Francis <a href="https://www.taylorfrancis.com/books/9780367802882">https://www.taylorfrancis.com/books/9780367802882</a> OCLC metadata license agreement <a href="http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf">http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf</a><br/>Format:&#160;Electronic Resources<br/>Availability&#160;Online Library~1<br/> Microoptics and nanooptics fabrication ent://SD_ILS/0/SD_ILS:539501 2026-01-02T10:04:05Z 2026-01-02T10:04:05Z Author&#160;Kemme, Shanalyn A.<br/>Preferred Shelf Number&#160;TA418.9 .N35 M533 2010<br/>Electronic Access&#160;<a href="https://www.taylorfrancis.com/books/9781420019148">Click here to view.</a><br/>Format:&#160;Books<br/>Availability&#160;Online Library~1<br/> Micromachining using electrochemical discharge phenomenon fundamentals and applications of spark assisted chemical engraving ent://SD_ILS/0/SD_ILS:146215 2026-01-02T10:04:05Z 2026-01-02T10:04:05Z Author&#160;W&uuml;thrich, Rolf.<br/>Preferred Shelf Number&#160;ONLINE<br/>Electronic Access&#160;ScienceDirect <a href="http://www.sciencedirect.com/science/book/9780815515876">http://www.sciencedirect.com/science/book/9780815515876</a><br/>Format:&#160;Electronic Resources<br/>Availability&#160;Online Library~1<br/> Principles of plasma discharges and materials processing ent://SD_ILS/0/SD_ILS:301733 2026-01-02T10:04:05Z 2026-01-02T10:04:05Z Author&#160;Lieberman, M. A. (Michael A.)&#160;Lichtenberg, Allan J.<br/>Preferred Shelf Number&#160;ONLINE<br/>Electronic Access&#160;<a href="http://dx.doi.org/10.1002/0471724254">Full text available from Wiley InterScience</a> Ebook Library <a href="http://public.eblib.com/EBLPublic/PublicView.do?ptiID=227410">http://public.eblib.com/EBLPublic/PublicView.do?ptiID=227410</a> John Wiley <a href="http://dx.doi.org/10.1002/0471724254">http://dx.doi.org/10.1002/0471724254</a> <a href="http://www3.interscience.wiley.com/cgi-bin/bookhome/109880578">http://www3.interscience.wiley.com/cgi-bin/bookhome/109880578</a> Contributor biographical information <a href="http://catdir.loc.gov/catdir/enhancements/fy0618/2004058503-b.html">http://catdir.loc.gov/catdir/enhancements/fy0618/2004058503-b.html</a><br/>Format:&#160;Electronic Resources<br/>Availability&#160;Online Library~1<br/> Industrial plasma engineering. Volume 2, Applications to nonthermal plasma processing ent://SD_ILS/0/SD_ILS:541062 2026-01-02T10:04:05Z 2026-01-02T10:04:05Z Author&#160;Roth, J. Reece., author.<br/>Preferred Shelf Number&#160;TA2020 .R68 2001<br/>Electronic Access&#160;<a href="https://www.taylorfrancis.com/books/9781420034127">Click here to view.</a><br/>Format:&#160;Books<br/>Availability&#160;Online Library~1<br/> Etching in microsystem technology ent://SD_ILS/0/SD_ILS:300698 2026-01-02T10:04:05Z 2026-01-02T10:04:05Z Author&#160;K&ouml;hler, J. M. (J. Michael), 1956-&#160;Wiley InterScience (Online service)<br/>Preferred Shelf Number&#160;ONLINE<br/>Electronic Access&#160;John Wiley <a href="http://dx.doi.org/10.1002/9783527613786">http://dx.doi.org/10.1002/9783527613786</a><br/>Format:&#160;Electronic Resources<br/>Availability&#160;Online Library~1<br/> &Auml;tzverfahren f&uuml;r die Mikrotechnik ent://SD_ILS/0/SD_ILS:300533 2026-01-02T10:04:05Z 2026-01-02T10:04:05Z Author&#160;K&ouml;hler, J. M. (J. Michael), 1956-&#160;John Wiley &amp; Sons.<br/>Preferred Shelf Number&#160;ONLINE<br/>Electronic Access&#160;John Wiley <a href="http://dx.doi.org/10.1002/3527602917">http://dx.doi.org/10.1002/3527602917</a><br/>Format:&#160;Electronic Resources<br/>Availability&#160;Online Library~1<br/> Dry etching for microelectronics ent://SD_ILS/0/SD_ILS:256126 2026-01-02T10:04:05Z 2026-01-02T10:04:05Z Author&#160;Powell, Ronald A.<br/>Preferred Shelf Number&#160;ONLINE<br/>Electronic Access&#160;ScienceDirect <a href="http://www.sciencedirect.com/science/book/9780444869050">http://www.sciencedirect.com/science/book/9780444869050</a><br/>Format:&#160;Electronic Resources<br/>Availability&#160;Online Library~1<br/>