Search Results for Plasma etching.SirsiDynix Enterprisehttps://katalog.hacettepe.edu.tr/client/en_US/default/default/qu$003dPlasma$002betching.$0026ps$003d300?2024-11-02T06:48:38ZPlasma etching an introductionent://SD_ILS/0/SD_ILS:2552082024-11-02T06:48:38Z2024-11-02T06:48:38ZAuthor Manos, Dennis M. Flamm, Daniel L.<br/>Preferred Shelf Number ONLINE<br/>Electronic Access ScienceDirect <a href="http://www.sciencedirect.com/science/book/9780124693708">http://www.sciencedirect.com/science/book/9780124693708</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>Plasma etching processes for CMOS device realizationent://SD_ILS/0/SD_ILS:4593502024-11-02T06:48:38Z2024-11-02T06:48:38ZAuthor Posseme, Nicolas, editor.<br/>Preferred Shelf Number ONLINE<br/>Electronic Access ScienceDirect <a href="http://www.sciencedirect.com/science/book/9781785480966">http://www.sciencedirect.com/science/book/9781785480966</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>Plasma deposition, treatment, and etching of polymersent://SD_ILS/0/SD_ILS:2561542024-11-02T06:48:38Z2024-11-02T06:48:38ZAuthor D'Agostino, Riccardo.<br/>Preferred Shelf Number ONLINE<br/>Electronic Access ScienceDirect <a href="http://www.sciencedirect.com/science/book/9780122004308">http://www.sciencedirect.com/science/book/9780122004308</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>Plasma processing of nanomaterialsent://SD_ILS/0/SD_ILS:2880322024-11-02T06:48:38Z2024-11-02T06:48:38ZAuthor Sankaran, Mohan.<br/>Preferred Shelf Number ONLINE<br/>Electronic Access <a href="http://marc.crcnetbase.com/isbn/9781439866771">Distributed by publisher. Purchase or institutional license may be required for access.</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>Micromachining using electrochemical discharge phenomenon fundamentals and applications of spark assisted chemical engravingent://SD_ILS/0/SD_ILS:1462152024-11-02T06:48:38Z2024-11-02T06:48:38ZAuthor Wüthrich, Rolf.<br/>Preferred Shelf Number ONLINE<br/>Electronic Access ScienceDirect <a href="http://www.sciencedirect.com/science/book/9780815515876">http://www.sciencedirect.com/science/book/9780815515876</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>Principles of plasma discharges and materials processingent://SD_ILS/0/SD_ILS:3017332024-11-02T06:48:38Z2024-11-02T06:48:38ZAuthor Lieberman, M. A. (Michael A.) Lichtenberg, Allan J.<br/>Preferred Shelf Number ONLINE<br/>Electronic Access <a href="http://dx.doi.org/10.1002/0471724254">Full text available from Wiley InterScience</a>
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John Wiley <a href="http://dx.doi.org/10.1002/0471724254">http://dx.doi.org/10.1002/0471724254</a>
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Contributor biographical information <a href="http://catdir.loc.gov/catdir/enhancements/fy0618/2004058503-b.html">http://catdir.loc.gov/catdir/enhancements/fy0618/2004058503-b.html</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>Etching in microsystem technologyent://SD_ILS/0/SD_ILS:3006982024-11-02T06:48:38Z2024-11-02T06:48:38ZAuthor Köhler, J. M. (J. Michael), 1956- Wiley InterScience (Online service)<br/>Preferred Shelf Number ONLINE<br/>Electronic Access John Wiley <a href="http://dx.doi.org/10.1002/9783527613786">http://dx.doi.org/10.1002/9783527613786</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>Ätzverfahren für die Mikrotechnikent://SD_ILS/0/SD_ILS:3005332024-11-02T06:48:38Z2024-11-02T06:48:38ZAuthor Köhler, J. M. (J. Michael), 1956- John Wiley & Sons.<br/>Preferred Shelf Number ONLINE<br/>Electronic Access John Wiley <a href="http://dx.doi.org/10.1002/3527602917">http://dx.doi.org/10.1002/3527602917</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>Dry etching for microelectronicsent://SD_ILS/0/SD_ILS:2561262024-11-02T06:48:38Z2024-11-02T06:48:38ZAuthor Powell, Ronald A.<br/>Preferred Shelf Number ONLINE<br/>Electronic Access ScienceDirect <a href="http://www.sciencedirect.com/science/book/9780444869050">http://www.sciencedirect.com/science/book/9780444869050</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>