Search Results for Plasma etching. - Narrowed by: Microlithography.
SirsiDynix Enterprise
https://katalog.hacettepe.edu.tr/client/en_US/default/default/qu$003dPlasma$002betching.$0026qf$003dSUBJECT$002509Subject$002509Microlithography.$002509Microlithography.$0026ps$003d300?
2024-11-07T14:10:15Z
Etching in microsystem technology
ent://SD_ILS/0/SD_ILS:300698
2024-11-07T14:10:15Z
2024-11-07T14:10:15Z
Author Köhler, J. M. (J. Michael), 1956- Wiley InterScience (Online service)<br/>Preferred Shelf Number ONLINE<br/>Electronic Access John Wiley <a href="http://dx.doi.org/10.1002/9783527613786">http://dx.doi.org/10.1002/9783527613786</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>
Ätzverfahren für die Mikrotechnik
ent://SD_ILS/0/SD_ILS:300533
2024-11-07T14:10:15Z
2024-11-07T14:10:15Z
Author Köhler, J. M. (J. Michael), 1956- John Wiley & Sons.<br/>Preferred Shelf Number ONLINE<br/>Electronic Access John Wiley <a href="http://dx.doi.org/10.1002/3527602917">http://dx.doi.org/10.1002/3527602917</a><br/>Format: Electronic Resources<br/>Availability Online Library~1<br/>