Arama Sonu&ccedil;lar&#305; Chemical mechanical planarization. - Daralt&#305;lm&#305;&#351;: Nanoelectronics. SirsiDynix Enterprise https://katalog.hacettepe.edu.tr/client/tr_TR/default_tr/default_tr/qu$003dChemical$002bmechanical$002bplanarization.$0026qf$003dSUBJECT$002509Konu$002509Nanoelectronics.$002509Nanoelectronics.$0026ic$003dtrue$0026ps$003d300?dt=list 2025-12-08T16:56:38Z Advances in chemical mechanical planarization (CMP) ent://SD_ILS/0/SD_ILS:458681 2025-12-08T16:56:38Z 2025-12-08T16:56:38Z Yazar&#160;Babu, S. V., editor.<br/>Yer Numaras&#305;&#160;ONLINE<br/>Elektronik Eri&#351;im&#160;ScienceDirect <a href="http://www.sciencedirect.com/science/book/9780081001653">http://www.sciencedirect.com/science/book/9780081001653</a><br/>Format:&#160;Elektrnik Kaynak<br/>Durum&#160;&Ccedil;evrimi&ccedil;i K&uuml;t&uuml;phane~1<br/> Nanoparticle engineering for chemical-mechanical planarization : fabrication of next-generation nanodevices ent://SD_ILS/0/SD_ILS:541443 2025-12-08T16:56:38Z 2025-12-08T16:56:38Z Yazar&#160;Paik, Ungyu.&#160;Park, Jea-Gun.<br/>Yer Numaras&#305;&#160;TK7874.84<br/>Elektronik Eri&#351;im&#160;Taylor & Francis <a href="https://www.taylorfrancis.com/books/9780429291890">https://www.taylorfrancis.com/books/9780429291890</a> OCLC metadata license agreement <a href="http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf">http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf</a><br/>Format:&#160;Elektrnik Kaynak<br/>Durum&#160;&Ccedil;evrimi&ccedil;i K&uuml;t&uuml;phane~1<br/>