Arama Sonuçları Diffusion. - Daraltılmış: Manufactures.SirsiDynix Enterprisehttps://katalog.hacettepe.edu.tr/client/tr_TR/default_tr/default_tr/qu$003dDiffusion.$0026qf$003dSUBJECT$002509Konu$002509Manufactures.$002509Manufactures.$0026ic$003dtrue$0026ps$003d300?dt=list2025-12-08T11:45:48ZResearch on Chemical Mechanical Polishing Mechanism of Novel Diffusion Barrier Ru for Cu Interconnectent://SD_ILS/0/SD_ILS:4013992025-12-08T11:45:48Z2025-12-08T11:45:48ZYazar Cheng, Jie. author. SpringerLink (Online service)<br/>Yer Numarası ONLINE<br/>Elektronik Erişim <a href="https://doi.org/10.1007/978-981-10-6165-3">https://doi.org/10.1007/978-981-10-6165-3</a><br/>Format: Elektrnik Kaynak<br/>Durum Çevrimiçi Kütüphane~1<br/>Progress in Scale Modeling, Volume II Selections from the International Symposia on Scale Modeling, ISSM VI (2009) and ISSM VII (2013)ent://SD_ILS/0/SD_ILS:5295602025-12-08T11:45:48Z2025-12-08T11:45:48ZYazar Saito, Kozo. editor. Ito, Akihiko. editor. Nakamura, Yuji. editor. Kuwana, Kazunori. editor. SpringerLink (Online service)<br/>Yer Numarası ONLINE<br/>Elektronik Erişim <a href="https://doi.org/10.1007/978-3-319-10308-2">https://doi.org/10.1007/978-3-319-10308-2</a><br/>Format: Elektrnik Kaynak<br/>Durum Çevrimiçi Kütüphane~1<br/>