Arama Sonu&ccedil;lar&#305; Microelectromechanical systems. - Daralt&#305;lm&#305;&#351;: Actuators. SirsiDynix Enterprise https://katalog.hacettepe.edu.tr/client/tr_TR/default_tr/default_tr/qu$003dMicroelectromechanical$002bsystems.$0026qf$003dSUBJECT$002509Konu$002509Actuators.$002509Actuators.$0026ic$003dtrue$0026te$003dILS$0026ps$003d300?dt=list 2024-12-25T09:22:25Z Optical nano and micro actuator technology ent://SD_ILS/0/SD_ILS:291650 2024-12-25T09:22:25Z 2024-12-25T09:22:25Z Yazar&#160;Knopf, George K.&#160;Otani, Yukitoshi.<br/>Yer Numaras&#305;&#160;ONLINE<br/>Elektronik Eri&#351;im&#160;<a href="http://marc.crcnetbase.com/isbn/9781439840542">Distributed by publisher. Purchase or institutional license may be required for access.</a><br/>Format:&#160;Elektrnik Kaynak<br/>Durum&#160;&Ccedil;evrimi&ccedil;i K&uuml;t&uuml;phane~1<br/> Micromechanics and MEMS classic and seminal papers to 1990 ent://SD_ILS/0/SD_ILS:249592 2024-12-25T09:22:25Z 2024-12-25T09:22:25Z Yazar&#160;Trimmer, W.&#160;Institute of Electrical and Electronics Engineers.<br/>Yer Numaras&#305;&#160;ONLINE<br/>Elektronik Eri&#351;im&#160;IEEE Xplore <a href="http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5273520">http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5273520</a><br/>Format:&#160;Elektrnik Kaynak<br/>Durum&#160;&Ccedil;evrimi&ccedil;i K&uuml;t&uuml;phane~1<br/>