Arama Sonu&ccedil;lar&#305; Microelectronics. - Daralt&#305;lm&#305;&#351;: 1997 SirsiDynix Enterprise https://katalog.hacettepe.edu.tr/client/tr_TR/default_tr/default_tr/qu$003dMicroelectronics.$0026qf$003dPUBDATE$002509Yay$0025C4$0025B1n$002bY$0025C4$0025B1l$0025C4$0025B1$0025091997$0025091997$0026ps$003d300$0026isd$003dtrue?dt=list 2025-03-21T19:46:17Z Chemical mechanical planarization of microelectronic materials ent://SD_ILS/0/SD_ILS:300816 2025-03-21T19:46:17Z 2025-03-21T19:46:17Z Yazar&#160;Steigerwald, Joseph M.&#160;Murarka, S. P.&#160;Gutmann, Ronald J.&#160;Wiley InterScience (Online service)<br/>Yer Numaras&#305;&#160;ONLINE<br/>Elektronik Eri&#351;im&#160;John Wiley <a href="http://dx.doi.org/10.1002/9783527617746">http://dx.doi.org/10.1002/9783527617746</a> Contributor biographical information <a href="http://catdir.loc.gov/catdir/bios/wiley041/96006198.html">http://catdir.loc.gov/catdir/bios/wiley041/96006198.html</a><br/>Format:&#160;Elektrnik Kaynak<br/>Durum&#160;&Ccedil;evrimi&ccedil;i K&uuml;t&uuml;phane~1<br/> Micromechanics and MEMS classic and seminal papers to 1990 ent://SD_ILS/0/SD_ILS:249592 2025-03-21T19:46:17Z 2025-03-21T19:46:17Z Yazar&#160;Trimmer, W.&#160;Institute of Electrical and Electronics Engineers.<br/>Yer Numaras&#305;&#160;ONLINE<br/>Elektronik Eri&#351;im&#160;IEEE Xplore <a href="http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5273520">http://ieeexplore.ieee.org/xpl/bkabstractplus.jsp?bkn=5273520</a><br/>Format:&#160;Elektrnik Kaynak<br/>Durum&#160;&Ccedil;evrimi&ccedil;i K&uuml;t&uuml;phane~1<br/>