Arama Sonu&ccedil;lar&#305; Plasma etching. - Daralt&#305;lm&#305;&#351;: Microlithography. SirsiDynix Enterprise https://katalog.hacettepe.edu.tr/client/tr_TR/default_tr/default_tr/qu$003dPlasma$002betching.$0026qf$003dSUBJECT$002509Subject$002509Microlithography.$002509Microlithography.$0026ic$003dtrue$0026ps$003d300? 2026-01-02T21:37:24Z Etching in microsystem technology ent://SD_ILS/0/SD_ILS:300698 2026-01-02T21:37:24Z 2026-01-02T21:37:24Z Yazar&#160;K&ouml;hler, J. M. (J. Michael), 1956-&#160;Wiley InterScience (Online service)<br/>Yer Numaras&#305;&#160;ONLINE<br/>Elektronik Eri&#351;im&#160;John Wiley <a href="http://dx.doi.org/10.1002/9783527613786">http://dx.doi.org/10.1002/9783527613786</a><br/>Format:&#160;Elektrnik Kaynak<br/>Durum&#160;&Ccedil;evrimi&ccedil;i K&uuml;t&uuml;phane~1<br/> &Auml;tzverfahren f&uuml;r die Mikrotechnik ent://SD_ILS/0/SD_ILS:300533 2026-01-02T21:37:24Z 2026-01-02T21:37:24Z Yazar&#160;K&ouml;hler, J. M. (J. Michael), 1956-&#160;John Wiley &amp; Sons.<br/>Yer Numaras&#305;&#160;ONLINE<br/>Elektronik Eri&#351;im&#160;John Wiley <a href="http://dx.doi.org/10.1002/3527602917">http://dx.doi.org/10.1002/3527602917</a><br/>Format:&#160;Elektrnik Kaynak<br/>Durum&#160;&Ccedil;evrimi&ccedil;i K&uuml;t&uuml;phane~1<br/>