Semiconductor materials analysis and fabrication process control proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference, Strasbourg, France, June 2-5, 1992
tarafından
 
Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control (1992 : Strasbourg, France)

Başlık
Semiconductor materials analysis and fabrication process control proceedings of Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control of the 1992 E-MRS Spring Conference, Strasbourg, France, June 2-5, 1992

Yazar
Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control (1992 : Strasbourg, France)

ISBN
9780444596918

Toplantı Adı Girişi
Symposium D on Diagnostic Techniques for Semiconductor Materials Analysis and Fabrication Process Control (1992 : Strasbourg, France)

Yayın Bilgileri
Amsterdam : North-Holland, 1993.

Fiziksel Tanımlama
1 online resource (xiv, 338 p.) : ill.

Seri
European Materials Research Society symposia proceedings ; v. 34

Seri Başlığı
European Materials Research Society symposia proceedings ; v. 34

Konu Terimleri
Semiconductors -- Analysis -- Congresses.
 
Semiconductors -- Quality control -- Congresses.
 
Semiconductors -- Optical properties -- Congresses.
 
Halbleiter.
 
Herstellung.
 
Kongress.
 
Prozessüberwachung.

Tür
Strassburg (1992)

Yazar Ek Girişi
Crean, G. M.
 
Stuck, R.
 
Woollam, John A.

Tüzel Kişi Ek Girişi
European Materials Research Society.

Elektronik Erişim
ScienceDirect http://www.sciencedirect.com/science/book/9780444899088


KütüphaneMateryal TürüDemirbaş NumarasıYer Numarası[[missing key: search.ChildField.HOLDING]]Durumu/İade Tarihi
Çevrimiçi KütüphaneE-Kitap256273-1001ONLINEElektronik Kütüphane