Principles of plasma discharges and materials processing
tarafından
 
Lieberman, M. A. (Michael A.)

Başlık
Principles of plasma discharges and materials processing

Yazar
Lieberman, M. A. (Michael A.)

ISBN
9780471724247
 
9780471720010
 
9780471724254

Basım Bilgisi
2nd ed.

Yayın Bilgileri
Hoboken, N.J. : Wiley-Interscience, c2005.

Fiziksel Tanımlama
1 online resource (xxxv, 757 p.) : ill.

Konu Terimleri
Plasma dynamics.
 
Thin films -- Surfaces.
 
Plasma etching.
 
Plasma chemistry -- Industrial applications.

Tür
Electronic books.

Yazar Ek Girişi
Lichtenberg, Allan J.

Elektronik Erişim
Full text available from Wiley InterScience
 
Ebook Library http://public.eblib.com/EBLPublic/PublicView.do?ptiID=227410
 
John Wiley http://dx.doi.org/10.1002/0471724254
 
http://www3.interscience.wiley.com/cgi-bin/bookhome/109880578
 
Contributor biographical information http://catdir.loc.gov/catdir/enhancements/fy0618/2004058503-b.html
 
http://swb.eblib.com/patron/FullRecord.aspx?p=227410


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