Silicon Semiconductor Technology Processing and Integration of Microelectronic Devices
tarafından
 
Hilleringmann, Ulrich. author.

Başlık
: 
Silicon Semiconductor Technology Processing and Integration of Microelectronic Devices

Yazar
: 
Hilleringmann, Ulrich. author.

ISBN
: 
9783658410414

Basım Bilgisi
: 
1st ed. 2023.

Fiziksel Tanımlama
: 
XI, 264 p. 178 illus., 2 illus. in color. online resource.

İçerik
: 
Wafer fabrication -- Thermal oxidation -- Lithography -- Etching technology -- Doping techniques -- Chemical and Physical Deposition -- Metallization and Contacts.

Konu Terimleri
: 
Electronics.
 
Electronic circuits.
 
Semiconductors.
 
Electronics and Microelectronics, Instrumentation.
 
Electronic Circuits and Systems.

Tüzel Kişi Ek Girişi
: 
SpringerLink (Online service)

Elektronik Erişim
: 
https://doi.org/10.1007/978-3-658-41041-4


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