Atomic Layer Deposition for Semiconductors
tarafından
Hwang, Cheol Seong. editor.
Başlık
:
Atomic Layer Deposition for Semiconductors
Yazar
:
Hwang, Cheol Seong. editor.
ISBN
:
9781461480549
Basım Bilgisi
:
1st ed. 2014.
Fiziksel Tanımlama
:
X, 263 p. 170 illus., 81 illus. in color. online resource.
İçerik
:
Introduction -- Precursors and reaction mechanisms -- ALD simulations -- ALD for mass-production memories (DRAM and Flash) -- ALD for emerging memories -- PcRAM -- FeRAM -- Front end of the line process -- Back end of the line -- ALD machines.
Konu Terimleri
:
Electrochemistry.
Semiconductors.
Computer storage devices.
Memory management (Computer science).
Electric power production.
Electronics.
Computer Memory Structure.
Electrical Power Engineering.
Mechanical Power Engineering.
Electronics and Microelectronics, Instrumentation.
Yazar Ek Girişi
:
Hwang, Cheol Seong.
Tüzel Kişi Ek Girişi
:
SpringerLink (Online service)
Elektronik Erişim
:
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