Photopolymers : photoresist materials, processes, and applications
tarafından
 
Nakamura, Kenichiro (Chemical engineer), author.

Başlık
Photopolymers : photoresist materials, processes, and applications

Yazar
Nakamura, Kenichiro (Chemical engineer), author.

ISBN
9781466517318

Fiziksel Tanımlama
1 online resource.

Seri
Optics and photonics ; Volume 10
 
Optics and photonics (Boca Raton, Fla.) ; Volume 10.

İçerik
1. Basic idea of photopolymerization -- 2. Chemically amplified resists -- 3. Process of chemically amplified resists -- 4. Nanoimprint -- 5. Industrial application of photopolymers.

Özet
"Advancements in photopolymers have led to groundbreaking achievements in electronic, optical, and medical engineering. At present, photopolymers have myriad applications in semiconductor device manufacturing, printed circuit boards (PCBs), ultraviolet (UV) curing, microelectromechanical systems (MEMS), and medical materials. Addressing topics such as chemically amplified resists, immersion lithography, extreme ultraviolet (EUV) lithography, and nanoimprinting, this book covers photopolymers from core concepts to industrial applications, providing the chemical formulae and structures of the materials discussed as well as practical case studies from some of the world's largest corporations"-- Provided by publisher.

Konu Terimleri
Microelectronics -- Materials.
 
Photopolymerization.
 
Photopolymers -- Industrial applications.
 
Photopolymers.
 
Photoresists.

Elektronik Erişim
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KütüphaneMateryal TürüDemirbaş NumarasıYer Numarası[[missing key: search.ChildField.HOLDING]]Durumu/İade Tarihi
Çevrimiçi KütüphaneE-Kitap539455-1001TA455 .P58 N35 2015CRC E-Books