chapter 1 Chapter Fabricating Surface-Relief Diffractive Optical Elements -- chapter 2 Chapter Fabrication of Microoptics with Plasma Etching Techniques -- chapter 3 Chapter Analog Lithography with Phase-Grating Masks -- chapter 4 Chapter Electron Beam Lithography for the Nanofabrication of Optical Devices -- chapter 5 Chapter Nanoimprint Lithography and Device Applications -- chapter 6 Chapter Design and Fabrication of Planar Photonic Crystals -- chapter 7 Chapter Fabrication of 3D Photonic Crystals: Molded Tungsten Approach.