chapter 1 Introduction -- chapter 2 Phenomenological Description of the Charged Particle Transport -- chapter 3 Macroscopic Plasma Characteristics -- chapter 4 Elementary Processes in Gas Phase and on Surfaces -- chapter 5 The Boltzmann Equation and Transport Equations of Charged Particles -- chapter 6 General Properties of Charged Particle Transport in Gases -- chapter 7 Modeling of Nonequilibrium (Low-Temperature) Plasmas -- chapter 8 Numerical Procedure of Modeling -- chapter 9 Capacitively Coupled Plasma -- chapter 10 Inductively Coupled Plasma -- chapter 11 Magnetically Enhanced Plasma -- chapter 12 Plasma Processing and Related Topics.