chapter 1 Introduction -- part Part I. Basic Bio-MEMS Fabrication Technologies -- chapter 2 UV Lithography of Ultrathick SU-8 for Microfabrication of High-Aspect-Ratio Microstructures and Applications in Microfluidic and Optical Components -- chapter 3 The LIGA Process: A Fabrication Process for High-Aspect-Ratio Microstructures in Polymers, Metals, and Ceramics -- chapter 4 Nanoimprinting Technology for Biological Applications -- chapter 5 Hot Embossing for Lab-on-a-Chip Applications -- part Part II. Microfluidic Devices and Components for Bio-MEMS -- chapter 6 Micropump Applications in Bio-MEMS -- chapter 7 Micromixers -- chapter 8 Microfabricated Devices for Smaple Ectraction, Concentrations, and Related Sample Processing Technologies -- chapter 9 Bio-MEMS Devices in Cell Manipulation: Microflow Cytometry and Applications -- part Part III. Sensing Technologies for Bio-MEMS Applications -- chapter 10 Coupling Electrochemical Detection with Microchip Capillary Electrophoresis -- chapter 11 Culture-Based Biochip for Rapid Detection of Environmental Mycobacteria -- chapter 12 MEMS for Drug Delivery -- chapter 13 Microchip Capillary Electrophoresis Systems for DNA Analysis -- chapter 14 Bio-MEMS Devices for Proteomics -- chapter 15 Single-Cell and Single-Molecule Analyses Using Microfluidic Devices -- chapter 16 Pharmaceutical Analysis Using Bio-MEMS.