ch.1. Introduction -- ch. 2. Nonthermal plasma chemical processes of general interest -- ch. 3. Physics of nonthermal plasmas -- ch. 4. Nonthermal plasma chemical reactors -- ch. 5. Elementary processes on surfaces in plasma-wall interaction -- ch. 6. Plasma diagnostics -- ch. 7. Surface and thin film analysis -- ch. 8. Selected applications -- ch. 9. Modeling and simulation -- ch. 10. Trends and new concepts.