chapter 1 Image Processing and Computer Vision for MEMS Testing -- chapter 2 Image Correlation Techniques for Microsystems Inspection -- chapter 3 Light Scattering Techniques for the Inspection of Microcomponents and Microstructures -- chapter 4 Characterization and Measurement of Microcomponents with the Atomic Force Microscope (AFM) -- chapter 5 Optical Profiling Techniques for MEMS Measurement -- chapter 6 Grid and Moire Methods for Micromeasurements -- chapter 7 Grating Interferometry for In-Plane Displacement and Strain Measurement of Microcomponents -- chapter 8 Interference Microscopy Techniques for Microsystem Characterization -- chapter 9 Measuring MEMS in Motion by Laser Doppler Vibrometry -- chapter 10 An Interferometric Platform for Static, Quasi-Static, and Dynamic Evaluation of Out-of-Plane Deformations of MEMS and MOEMS -- chapter 11 Optoelectronic Holography for Testing Electronic Packaging and MEMS -- chapter 12 Digital Holography and Its Application in MEMS/MOEMS Inspection -- chapter 13 Speckle Metrology for Microsystem Inspection -- chapter 14 Spectroscopic Techniques for MEMS Inspection.