Microengineering, MEMS, and interfacing : a practical guide
tarafından
 
Banks, Danny., author.

Başlık
: 
Microengineering, MEMS, and interfacing : a practical guide

Yazar
: 
Banks, Danny., author.

ISBN
: 
9780429118883

Fiziksel Tanımlama
: 
1 online resource

Seri
: 
Mechanical engineering ; 199

İçerik
: 
chapter 1 Photolithography -- chapter 2 Silicon Micromachining -- chapter 3 Nonsilicon Processes -- chapter 4 Mask Design -- chapter 5 Microsensors -- chapter 6 Microactuators -- chapter 7 Micro Total Analysis Systems -- chapter 8 Integrated Optics -- chapter 9 Assembly and Packaging -- chapter 10 Nanotechnology -- part Part III -- chapter 11 Amplifiers and Filtering -- chapter 12 Computer Interfacing.

Konu Terimleri
: 
Microelectromechanical systems.

Elektronik Erişim
: 
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KütüphaneMateryal TürüDemirbaş NumarasıYer Numarası[[missing key: search.ChildField.HOLDING]]Durumu/İade Tarihi
Çevrimiçi KütüphaneE-Kitap544843-1001TK7875 .B36 2006CRC E-Books