Plasma electronics : applications in microelectronic device fabrication
tarafından
 
Makabe, T. (Toshiaki), author.

Başlık
Plasma electronics : applications in microelectronic device fabrication

Yazar
Makabe, T. (Toshiaki), author.

ISBN
9781482222104

Basım Bilgisi
Second edition.

Fiziksel Tanımlama
1 online resource

İçerik
chapter 1. Introduction -- chapter 2. Phenomenological description of the charged particle transport -- chapter 3. Macroscopic plasma characteristics -- chapter 4. Elementary processes in gas phase and on surfaces -- chapter 5. The Boltzmann equation and transport equations of charged particles -- chapter 6. General properties of charged particle transport in gases -- chapter 7. Modeling of nonequilibrium (low temperature) plasmas -- chapter 8. Numerical procedure of modeling -- chapter 9. Capacitively coupled plasma -- chapter 10. Inductively coupled plasma -- chapter 11. Magnetically enhanced plasma -- chapter 12. Plasma processing and related topics -- chapter 13. Atmospheric-pressure, low-temperature plasma.

Konu Terimleri
Plasma engineering.

Yazar Ek Girişi
Petrovic, Z.,

Elektronik Erişim
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KütüphaneMateryal TürüDemirbaş NumarasıYer Numarası[[missing key: search.ChildField.HOLDING]]Durumu/İade Tarihi
Çevrimiçi KütüphaneE-Kitap546210-1001TA2020 .M35 2015CRC E-Books