Semiconductor industry : wafer fab exhaust management
tarafından
Sherer, J. Michael, 1958- author.
Başlık
:
Semiconductor industry : wafer fab exhaust management
Yazar
:
Sherer, J. Michael, 1958- author.
ISBN
:
9781315221052
9781351828253
Fiziksel Tanımlama
:
1 online resource (194 pages)
İçerik
:
chapter 1 Semiconductor and Wafer Manufacturing Facilities -- chapter 2 Exhaust Types and Challenges -- chapter 3 Point-Of-Use Devices and Exhaust- Line Requirements -- chapter 4 Centralized Scrubbers -- chapter 5 Centralized Equipment to Control Volatile Organic Compounds -- chapter 6 Emergency Releases -- chapter 7 Exhaust Management and Air Abatement Equipment Examples.
Konu Terimleri
:
Air -- Purification -- Technological innovations.
Semiconductor industry -- Environmental aspects.
Semiconductor wafers -- Design and construction.
Volatile organic compounds -- Environmental aspects.
Elektronik Erişim
:
| Kütüphane | Materyal Türü | Demirbaş Numarası | Yer Numarası | [[missing key: search.ChildField.HOLDING]] | Durumu/İade Tarihi |
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| Çevrimiçi Kütüphane | E-Kitap | 546494-1001 | TK7871.85 .S5224 2005 | | CRC E-Books |