1. Introduction -- 2. Nonlinear dynamics and modeling -- 3. Identification and compensation of Preisach Hysteresis in Piezoelectric actuators -- 4. Identification and compensation of friction and ripple force -- 5. Model predictive control of precise actuators -- 6. Modeling and control of air bearing stages -- 7. Fault detection and accommodation in actuators -- 8. Case studies of precise actuator applications.