Microlithography : science and technology
tarafından
 
Smith, Bruce W., 1959- editor.

Başlık
: 
Microlithography : science and technology

Yazar
: 
Smith, Bruce W., 1959- editor.

ISBN
: 
9781315117171
 
9781439876763
 
9781351633949
 
9781351643443

Basım Bilgisi
: 
Third edition.

Fiziksel Tanımlama
: 
1 online resource.

Konu Terimleri
: 
Microlithography -- Industrial applications.
 
Integrated circuits -- Masks.
 
Metal oxide semiconductors, Complementary -- Design and construction.
 
Manufacturing processes.
 
TECHNOLOGY / Lasers
 
TECHNOLOGY / Electronics / Microelectronics

Yazar Ek Girişi
: 
Smith, Bruce W., 1959-
 
Suzuki, Kazuaki,

Elektronik Erişim
: 
Taylor & Francis https://www.taylorfrancis.com/books/9781315117171
 
OCLC metadata license agreement http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf


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