Green etching techniques for MEMS applications : sustainable, fluorine-free etching methods for micro-electro-mechanical systems
tarafından
 
Wang, Kaiying, author.

Başlık
: 
Green etching techniques for MEMS applications : sustainable, fluorine-free etching methods for micro-electro-mechanical systems

Yazar
: 
Wang, Kaiying, author.

ISBN
: 
9781040767054
 
9781003674795
 
9781040766941

Fiziksel Tanımlama
: 
1 online resource (168 pages) : illustrations (black and white)

Konu Terimleri
: 
Microelectromechanical systems -- Design and construction.
 
Semiconductors -- Etching.

Elektronik Erişim
: 
Taylor & Francis https://www.taylorfrancis.com/books/9781003674795
 
OCLC metadata license agreement http://www.oclc.org/content/dam/oclc/forms/terms/vbrl-201703.pdf


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