
Başlık:
SiGe and Si strained-layer epitaxy for silicon heterostructure devices
Yazar:
Cressler, John D.
ISBN:
9781315218908
9781351826105
9781420066869
Fiziksel Tanımlama:
1 online resource (264 pages)
Genel Not:
The material was previously published in Silicon heterostructure handbook : materials, fabrication, devices, circuits and applications of SiGe and Si strained-layer epitaxy, Taylor and Francis, 2005--T.p. verso.
İçerik:
chapter 1 The Big Picture -- chapter 2 A Brief History of the Field -- chapter 3 Overview: SiGe and Si Strained-Layer Epitaxy -- chapter 4 Strained SiGe and Si Epitaxy -- chapter 5 Si-SiGe(C) Epitaxy by RTCVD -- chapter 6 MBE Growth Techniques -- chapter 7 UHV/CVD Growth Techniques -- chapter 8 Defects and Diffusion in SiGe and Strained Si -- chapter 9 Stability Constraints in SiGe Epitaxy -- chapter 10 Electronic Properties of Strained Si/SiGe and Si1-yCy Alloys -- chapter 11 Carbon Doping of SiGe -- chapter 12 Contact Metallization on Silicon�Germanium -- chapter 13 Selective Etching Techniques for SiGe/Si.
Yazar Ek Girişi:
Tek Biçim Eser Adı:
Silicon heterostructure handbook.
Elektronik Erişim:
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Kütüphane | Materyal Türü | Demirbaş Numarası | Yer Numarası | Durumu/İade Tarihi | Materyal Ayırtma |
|---|---|---|---|---|---|
Arıyor... | E-Kitap | 543480-1001 | TK7871.96 .B55 S53 2008 | Arıyor... | Arıyor... |
