chapter 1 Semiconductor and Wafer Manufacturing Facilities -- chapter 2 Exhaust Types and Challenges -- chapter 3 Point-Of-Use Devices and Exhaust- Line Requirements -- chapter 4 Centralized Scrubbers -- chapter 5 Centralized Equipment to Control Volatile Organic Compounds -- chapter 6 Emergency Releases -- chapter 7 Exhaust Management and Air Abatement Equipment Examples.