chapter 1 Introduction -- chapter 2 Thickness Metrology -- chapter 3 Composition and Phase Metrology -- chapter 4 Strain and Stress Metrology -- chapter 5 Mosaic Metrology -- chapter 6 Interface Roughness Metrology -- chapter 7 Porosity Metrology -- chapter 8 Specular X-ray Reflectivity -- chapter 9 X-ray Diffuse Scattering -- chapter 10 Theory of XRD on Polycrystals -- chapter 11 High-Resolution XRD on Single Crystals -- chapter 12 Diffraction Imaging and Defect Mapping -- chapter 13 Modeling and Analysis -- chapter 14 Instrumentation -- chapter 15 Accuracy and Precision of X-ray Metrology.