
Başlık:
Plasma electronics : applications in microelectronic device fabrication
Yazar:
Makabe, T. (Toshiaki), author.
ISBN:
9781482222104
Basım Bilgisi:
Second edition.
Fiziksel Tanımlama:
1 online resource
İçerik:
chapter 1. Introduction -- chapter 2. Phenomenological description of the charged particle transport -- chapter 3. Macroscopic plasma characteristics -- chapter 4. Elementary processes in gas phase and on surfaces -- chapter 5. The Boltzmann equation and transport equations of charged particles -- chapter 6. General properties of charged particle transport in gases -- chapter 7. Modeling of nonequilibrium (low temperature) plasmas -- chapter 8. Numerical procedure of modeling -- chapter 9. Capacitively coupled plasma -- chapter 10. Inductively coupled plasma -- chapter 11. Magnetically enhanced plasma -- chapter 12. Plasma processing and related topics -- chapter 13. Atmospheric-pressure, low-temperature plasma.
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Kütüphane | Materyal Türü | Demirbaş Numarası | Yer Numarası | Durumu/İade Tarihi | Materyal Ayırtma |
|---|---|---|---|---|---|
Arıyor... | E-Kitap | 546210-1001 | TA2020 .M35 2015 | Arıyor... | Arıyor... |
