<B><I><P>Section i Humidity-Sensitive Materials</P></I><P>Chapter 1 </B>Polymers .................................................................................................................................................................. 3</P><B><P>Chapter 2 </B>Metal Oxide in Humidity Sensors ......................................................................................................................... 23</P><B><P>Chapter 3 </B>Al2O3 as a Humidity-Sensitive Material ............................................................................................................... 35</P><B><P>Chapter 4 </B>Carbon-Based Materials ........................................................................................................................................ 51</P><B><P>Chapter 5 </B>Semiconductor-Based Humidity Sensors .............................................................................................................. 91</P><B><P>Chapter 6 </B>Porous Silicon ...................................................................................................................................................... 109</P><B><P>Chapter 7 </B>Mesoporous Silica and Its Prospects for Humidity Sensor Application ............................................................ 139</P><B><P>Chapter 8 </B>Aluminosilicate (Zeolites)-Based Humidity Sensors ........................................................................................ 151</P><B><P>Chapter 9 </B>Metal Phosphate-Based Humidity Sensitive Materials ...................................................................................... 163</P><B><P>Chapter 10 </B>Black Phosphorus and Phosphorene-Based Humidity Sensors ..........................................................................171</P><B><P>Chapter 11 </B>Metal-Organic Framework-Based Humidity Sensors ........................................................................................ 187</P><B><P>Chapter 12 </B>Supramolecular Materials .................................................................................................................................. 209</P><B><P>Chapter 13 </B>Biomaterials as Sensing Elements of Humidity Sensors ................................................................................... 223</P><P><B><I>Section ii Sensor technologies and Related Materials</P></I><P>Chapter 14 </B>Substrates and Electrodes in Humidity Sensors ................................................................................................ 229</P><P><B>Chapter 15 </B>Fundamentals of Microfabrication Technologies............................................................................................... </P><B><P>Chapter 16 </B>Micromachining Platforms for Humidity Sensors and Examples of Their Fabrication .................................... 263</P><P><B>Chapter 17 </B>Platforms and Materials for QCM and SAW-Based Humidity Sensors ............................................................ 271</P><P><B>Chapter 18 </B>Technologies Suitable for Fabrication of Humidity Sensing Layers: General Consideration ............................ 281</P><B><P>Chapter 19 </B>Polymer Technologies ........................................................................................................................................ 305</P><P><B>Chapter 20 </B>Synthesis of Humidity-Sensitive Metal Oxides: Powder Technologies ............................................................. 339</P><P><B>Chapter 27 </B>Comparative Analysis of Humidity Sensors and Their Advantages and Shortcomings ................................... 445</P><P><B>Chapter 28 </B>Market of Electronic Humidity Sensors ............................................................................................................ 453</P>